Wafers can be misaligned or broken due to robot issues or process chamber “sticking” or “sliding”
Early detection of wafer misalignment is crucial for diagnosing robot issues
Easy to install and compatible with 4”, 6”, 8” wafers
Wafer Detect Kit will stop wafer processing if it detects a wafer that is misaligned
Detection capability for Ch. A or Ch. B position depending on customer production demands
Wafer Detect Kit has been qualified and is currently operating at customer sites globally (200 kits)
Detect wafer misalignment in Chamber A/B. Al “Sticking” can cause greater chance for wafer misalignment and subsequent wafer breakage.
Installed over 200 customers and has been proven to reducing wafer breakages
Three detection sensors emit a beam onto 3 positions on the outside pedestal, forming a triangular beam area immediately on the wafer.
Fine adjustment to sensors can me made depending on wafer type, reflectivity, and wafer shapes