Size : 100mm, 150mm, 200mm, 300mm
Shape: Notch, Flat, Double Flat, Rectangular, Thin Wfr
Material: Si, GaAs, Glass, Sapphire, Sic
Metal (AI, TI, TIN, NIV, Ag, Cr, Ni, Cu, etc.)
Oxides/Nitrides (Al2O3, AIN, SiO2, SiN, TiOx)
Novel Films (TiW, TIWN, W, WN, Nb, Ge, Si, SiCr, ITO)
Standard PVD // IMP // SIP // SIP EnCoRe
STD DC // DC Pulse // RF
Clamped // B101 // ESC