AlignKAT™ has the capability to detect non-standard wafers such as transparent, semi transparent, double flat and triple flat wafers.
Extensive field data at over 25 customer sites with more than 5 years of performance results. AlignKAT™ shows exceptional reliability at all type of situations.
Up to 500,000 wafer data logs can be stored and used to figure out the root cause of issues such as wafer handoff, sliding on pedestal, motor vibration, or wafer edge status.
Prevent the misalignment using a geometrical analysis and learning algorithm removing signal noise from external influences.