Programmable dechucking capability without altering process recipe
Wide temperature range capability (-40°C ~ 500°C)
Reduction in dechucking issues especially at temperatures below 200°C
Easy replacement for OEM ESC P/S setup
Minimal footprint on generator rack and can fit in 1U slot space between existing power supplies
Installed and qualified at multiple customer sites with various ESC types (e.g., MCA, MCA+, HT, SLT, SZ, etc.)
The electronic chuck profile can be uploaded to the power supply through a user-friendly software interface.
Installed over 30 customers and have been qualified to be comparable or superior to the OEM setup (>200 units)
Compared to existing product limited to 1.5kV, Semicat Semicat ESC Power Supply provides wide range of application up to 3kV.
It can fit in 1U height slot spaces between existing power supplies and generators. Less than 5 hours required for Installation and Test.