New SURPASS PVD System

NEW SURPASS PVD SYSTEM

The new SURPASS200 PVD System has been designed and qualified for 200mm semiconductor production. The SURPASS200 allows for process transparency by integrating existing Endura® process chambers, including PVD, Sputter Etch, and Orient/Degas on to the new up-to-date system architecture. In addition, enhancements such as dual blade robots for front and back transfer chambers, automatic wafer positioning system, and new software are available. For customers, there is now another solution for capacity requirements without risking reliability, process, or productivity as compared to Endura mainframe. Semicat can provide both types of solutions, Refurbished PVD Endura® or New PVD SURPASS.
Process Transparency

Up-to-date System Architecture

Software Flexibility

ITEMENDURA®SURPASSREMARKS
PROCESSSAME PERFORMANCESAME PERFORMANCESAME PERFORMANCE
PROCESS KIT & TARGETSAME FOR ENDURA AND SURPASSSAME FOR ENDURA AND SURPASSSAME FOR ENDURA AND SURPASS
SOFTWARE- Must pay S/W license to AMAT if tool is purchased from 3rd party
- AMAT does not support tools if S/W is not purchased
S/W License included with system purchase- No additional cost
- No ties to AMAT
COMMUNICATION & CPU TYPEVME Card PCB (Single Board Computer)Latest server computing technology with PLCExtendable
SPARE PARTS Many obsoleted partsEasy to secure and be able to implement latest components 1990 Design vs. 2020 Design
ROBOT1x VHP Robot can only be installed on transfer chamber2x Dual Blade Robot can be installed on both buffer and transfer chambersImprove Throughput

User Interface Comparison

Wafer Monitor Screen

ENDURA w/ Legacy Software
SURPASS W/ Window Based Software