ITEM | ENDURA® | SURPASS | REMARKS |
---|---|---|---|
PROCESS | SAME PERFORMANCE | SAME PERFORMANCE | SAME PERFORMANCE |
PROCESS KIT & TARGET | SAME FOR ENDURA AND SURPASS | SAME FOR ENDURA AND SURPASS | SAME FOR ENDURA AND SURPASS |
SOFTWARE | - Must pay S/W license to AMAT if tool is purchased from 3rd party - AMAT does not support tools if S/W is not purchased | S/W License included with system purchase | - No additional cost - No ties to AMAT |
COMMUNICATION & CPU TYPE | VME Card PCB (Single Board Computer) | Latest server computing technology with PLC | Extendable |
SPARE PARTS | Many obsoleted parts | Easy to secure and be able to implement latest components | 1990 Design vs. 2020 Design |
ROBOT | 1x VHP Robot can only be installed on transfer chamber | 2x Dual Blade Robot can be installed on both buffer and transfer chambers | Improve Throughput |